TY - GEN
T1 - Fabrication of a miniaturized 64-element high-frequency phased array
AU - Bezanson, A.
AU - Garland, P.
AU - Adamson, R.
AU - Brown, J. A.
PY - 2012
Y1 - 2012
N2 - We have developed a 40 MHz, 64-element phased array transducer packaged into a 2.5mm by 3.1mm endoscopic form factor. The array is a forward looking kerfless design based on PMN-32%PT with an element-to-element pitch of 38 microns. In order to achieve such a miniaturized form factor, a novel technique of wire bonding the array elements to a miniature flex circuit oriented in line with the forward looking ultrasound beam was developed. A technique of scratch dicing the back of the array was also implemented in order to improve directivity of the array elements The array was fabricated with a single P(DVF-TrFE) matching layer and a TPX lens for passive elevation focussing to a depth of 7mm. The two-way-6dB pulse bandwidth was measured to be 55% and the average electromechanical coupling (kT) for the individual elements was measured to be 0.62. The one-way directivity pattern from single elements was measured to be +/-25 degrees, which was shown to be a large improvement compared to an identical kerfless array. The-3dB elevation focus resulting from a TPX lens was measured to be 152 microns at the focal depth (∼7mm).
AB - We have developed a 40 MHz, 64-element phased array transducer packaged into a 2.5mm by 3.1mm endoscopic form factor. The array is a forward looking kerfless design based on PMN-32%PT with an element-to-element pitch of 38 microns. In order to achieve such a miniaturized form factor, a novel technique of wire bonding the array elements to a miniature flex circuit oriented in line with the forward looking ultrasound beam was developed. A technique of scratch dicing the back of the array was also implemented in order to improve directivity of the array elements The array was fabricated with a single P(DVF-TrFE) matching layer and a TPX lens for passive elevation focussing to a depth of 7mm. The two-way-6dB pulse bandwidth was measured to be 55% and the average electromechanical coupling (kT) for the individual elements was measured to be 0.62. The one-way directivity pattern from single elements was measured to be +/-25 degrees, which was shown to be a large improvement compared to an identical kerfless array. The-3dB elevation focus resulting from a TPX lens was measured to be 152 microns at the focal depth (∼7mm).
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U2 - 10.1109/ULTSYM.2012.0528
DO - 10.1109/ULTSYM.2012.0528
M3 - Conference contribution
AN - SCOPUS:84882423936
SN - 9781467345613
T3 - IEEE International Ultrasonics Symposium, IUS
SP - 2114
EP - 2117
BT - 2012 IEEE International Ultrasonics Symposium, IUS 2012
T2 - 2012 IEEE International Ultrasonics Symposium, IUS 2012
Y2 - 7 October 2012 through 10 October 2012
ER -