Fabrication of a miniaturized 64-element high-frequency phased array

A. Bezanson, P. Garland, R. Adamson, J. A. Brown

Producción científica: Capítulo en Libro/Reporte/Acta de conferenciaContribución a la conferencia

6 Citas (Scopus)

Resumen

We have developed a 40 MHz, 64-element phased array transducer packaged into a 2.5mm by 3.1mm endoscopic form factor. The array is a forward looking kerfless design based on PMN-32%PT with an element-to-element pitch of 38 microns. In order to achieve such a miniaturized form factor, a novel technique of wire bonding the array elements to a miniature flex circuit oriented in line with the forward looking ultrasound beam was developed. A technique of scratch dicing the back of the array was also implemented in order to improve directivity of the array elements The array was fabricated with a single P(DVF-TrFE) matching layer and a TPX lens for passive elevation focussing to a depth of 7mm. The two-way-6dB pulse bandwidth was measured to be 55% and the average electromechanical coupling (kT) for the individual elements was measured to be 0.62. The one-way directivity pattern from single elements was measured to be +/-25 degrees, which was shown to be a large improvement compared to an identical kerfless array. The-3dB elevation focus resulting from a TPX lens was measured to be 152 microns at the focal depth (∼7mm).

Idioma originalEnglish
Título de la publicación alojada2012 IEEE International Ultrasonics Symposium, IUS 2012
Páginas2114-2117
Número de páginas4
DOI
EstadoPublished - 2012
Evento2012 IEEE International Ultrasonics Symposium, IUS 2012 - Dresden, Germany
Duración: oct. 7 2012oct. 10 2012

Serie de la publicación

NombreIEEE International Ultrasonics Symposium, IUS
ISSN (versión impresa)1948-5719
ISSN (versión digital)1948-5727

Conference

Conference2012 IEEE International Ultrasonics Symposium, IUS 2012
País/TerritorioGermany
CiudadDresden
Período10/7/1210/10/12

ASJC Scopus Subject Areas

  • Acoustics and Ultrasonics

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