Resumen
In this work, a 355 nm pulsed picosecond laser dicing system is used to cut a 40 MHz 1-3 composite, an 11.6 MHz circularly symmetric 1-3 composite, and create custom electrode fanouts and element sub-dices for a 40 MHz phased array. The kerfs for the 40 MHz, composite, measuring 42 mumathrm{m} thick, were measured to be 3.2 mumathrm{m} and the pillars 15.8 mumathrm{m} square. kt was found to be 0.43 under no bias and 0.47 with a DC bias. The circularly symmetric composite shows a kt of 0.62 but contains spurious acoustic modes within the operating band which could be accounted for in the future by adjusting pillar spacing or changing epoxy filler. The circular composite has pillars designed to be 50 mumathrm{m} square, with kerfs of 30 mumathrm{m}. Total thickness is 148 mumathrm{m} which results in an 11.68 MHz resonance. A phased array electrode pattern was defined on a piezoelectric substrate with a fan-out geometry for electrical interconnect. This pattern contained features measuring less than 3 um in width. This array was subsequently kerfed fully through the piezoelectric substrate as well as sub-diced starting from within the array element.
Idioma original | English |
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Título de la publicación alojada | IUS 2020 - International Ultrasonics Symposium, Proceedings |
Editorial | IEEE Computer Society |
ISBN (versión digital) | 9781728154480 |
DOI | |
Estado | Published - sep. 7 2020 |
Evento | 2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States Duración: sep. 7 2020 → sep. 11 2020 |
Serie de la publicación
Nombre | IEEE International Ultrasonics Symposium, IUS |
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Volumen | 2020-September |
ISSN (versión impresa) | 1948-5719 |
ISSN (versión digital) | 1948-5727 |
Conference
Conference | 2020 IEEE International Ultrasonics Symposium, IUS 2020 |
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País/Territorio | United States |
Ciudad | Las Vegas |
Período | 9/7/20 → 9/11/20 |
Nota bibliográfica
Publisher Copyright:© 2020 IEEE.
ASJC Scopus Subject Areas
- Acoustics and Ultrasonics