Frictional MEMS: moving at the micro scale

Frictional MEMS: moving at the micro scaleMEMS (Micro-Electro-Mechanical Systems) are small devices with feature sizes as small as 1 micron. Motion at the micro scale is dominated by friction: thus many MEMS designs try to avoid friction. If MEMS devices are to be used to their full potential we should use micro-friction to our advantage rather than work against it. The author proposes to develop novel MEMS actuators that utilize friction. This area is important as there is a need for the development of new micro actuators that can produce long ranges of motion, high speed and high output forces. Possible applications include motion stages, micro-robotics, micro-assembly and smart surfaces.Friction is an integral part of the locomotion of many small organisms and at Dalhousie we have used these principles for bio inspired MEMS devices. Specifically our lab has developed mobile frictional micro-devices that operate in modes inspired by: snails, crabs, cilia and earthworms. Our group has produced frictional micro crawlers that use a novel form of MEMS locomotion similar to snails. We have also demonstrated 2-DOF planar frictional micro-conveyors able to move in X/Y and X/Rotation, using a hybrid snail/crab locomotion.Future work: 1) Improving current frictional crawlers to increase speed, range and force. 2) Friction measurements and characterization to improve device reliability/robustness. 3) Researching the locomotion modes of other small scale organisms e.g.: 2D fields of planar cilia, and earthworm inspired peristaltic motors. The ultimate goal is to integrate all these aspects into practical frictional micro-systems capable of i) moving long distances ii) applying large forces and iii) doing so reliably and repeatedly.