Résumé
The fabrication and performance of miniature high frequency (40-60 MHz) annular arrays is described. The arrays were fabricated using photolithography to define the electrode pattern, and ultrasonic wire bonding to make electrical contacts. The transducers were 2 mm in diameter with seven equal area elements and a centre frequency of 50 MHz. A -6 dB two-way beam width of 75 microns was found at f/2. The radiation pattern decreased smoothly to less than -60 dB at a distance of 550 microns.
Langue d'origine | English |
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Pages (de-à) | 869-872 |
Nombre de pages | 4 |
Journal | Proceedings - IEEE Ultrasonics Symposium |
Volume | 1 |
Statut de publication | Published - 2003 |
Publié à l'externe | Oui |
Événement | 2003 IEEE Ultrasonics Symposium - Proceedings - Honolulu, HI, United States Durée: oct. 5 2003 → oct. 8 2003 |
ASJC Scopus Subject Areas
- Acoustics and Ultrasonics